Comparison ledger
Hitachi 1305 BSG 3, SCREEN FS 820 L Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | FS 820 L WaferSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN FS 820 L Wafer |
| Specifications | ||
| Configuration | — | Baths (3)[1] |
| OEM | — | SCREEN / DNS[1] |
| Model | — | FS 820 L Wafer[2] |
| Equipment type | — | Wafer Cleaner[2] |
| Wafer size | — | 6 inch[1] |
| Baths | — | 3[1] |
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