Comparison ledger
Hitachi 1305 BSG 3, Semitool 870 S Dual Stack Spin Rinse, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | 870 S Dual Stack Spin RinseSemitool |
|---|---|---|
| OEM | Hitachi | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Semitool 870 |
| Specifications | ||
| Phase | — | 1 Phase[1] |
| Configuration | — | 3 Wire[1] |
| Voltage | — | 220 Vac[1] |
| Wires | — | 3 Wire[1] |
| Frequency | — | 50/60 Hz[1] |
| Vintage | — | 2010[1] |
| Make | — | Semitool[2] |
| Model | — | SRD 870 S[2] |
| Equipment type | — | Dual Stack Spin Rinse Dryer (SRD)[2] |
| Power | — | 1 Phase, 3 Wire, 220 Vac, 50/60 Hz[1] |
| Wafer capacity | — | Up to 6/150[3] |
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