Comparison ledger
Hitachi 1305 BSG 3, SUSS MicroTec RC 8 MS 3 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | RC 8 MS 3 SpinSUSS MicroTec |
|---|---|---|
| OEM | Hitachi | SUSS MicroTec |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SUSS MicroTec RC 8 MS 3 Spin |
| Specifications | ||
| Frequency | — | 50 Hz[1] |
| Voltage | — | 220 V[1] |
| Configuration | — | With controller[1] |
| Does not include add-ons (ex | — | edge bead removal / dispense and autoclean)[1] |
| Type | — | Spin coater[1] |
| Vintage | — | 2001[2] |
| Controller | — | With controller[1] |
| High Gyrset | — | 3, 5 and 8[2] |
| Air | — | 4-9 bar[2] |
| Vacuum | — | -0.6 bar[2] |
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