Waferpedia

Comparison ledger

S 4160 FE-SEMversus.498 PSL Wafer

Hitachi S 4160 FE-SEM, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
S 4160 FE-SEMHitachi
.498 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run1996–—
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 4160 FE-SEMKLA .498 PSL Wafer
Specifications
Vintage1996[1]—
Configuration—NIST Traceable[2]
NIST traceability—Yes[2]
S 4160 FE-SEM entry.498 PSL Wafer entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing