Comparison ledger
Hitachi S 4700 II, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 4700 IIHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4700 | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | Single Phase[1] | NIST Traceable[3] |
| Tool type | Scanning electron microscope (SEM)[1] | — |
| Power | Single Phase[2] | — |
| Control system | Windows 2000 based system[1] | — |
| Stage | Type 2 Stage[1] | — |
| Stage system | Motorized stage system[1] | — |
| Monitor | 17 inch LCD monitor[1] | — |
| Control PC | Pentium 4 control PC[1] | — |
| Included items | Display Unit; Power Rack; IP Power Rack[1] | — |
| Vacuum and pumping | Rotary Pump (x2); Weight and Vacuum Hose[2] | — |
| Vintage | 2001 Vintage[1] | — |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
| Category | — | Metrology & Inspection[4] |
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