Comparison ledger
KLA 1.112 PSL Wafer, KLA 2131, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2131KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1994– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 21xx |
| Specifications | ||
| Configuration | NIST Traceable[1] | HDD[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Manufacturer | — | KLA[4] |
| Category | — | Metrology & Inspection[4] |
| Type | — | inspection system[4] |
| Wafer sizes | — | 6 inch[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →