Comparison ledger
KLA 1.112 PSL Wafer, KLA Surfscan SP 1 DLS Centering Ring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | Refurbished[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Manufacturer | — | KLA[4] |
| Model | — | Surfscan SP 1 DLS[4] |
| Condition | — | Refurbished[4] |
| Configured wafer size | — | 200/300mm wafers[5] |
| Laser | — | Argon ion laser (488nm)[5] |
| Defect sensitivity | — | 0.050um defect sensitivity on polished bare silicon[5] |
| Surface inspection type | — | Unpatterned surface inspection system[5] |
| Component | — | Centering Ring[4] |
| System type | — | Unpatterned surface inspection system[4] |
| Inspection functions | — | Defect maps and histograms, real-time defect classification, and map-to-map comparison[4] |
| Enhanced rough film sensitivity | — | Stated[5] |
| Operator interface | — | Stated[5] |
| Blower unit | — | Stated[5] |
| OEM part number | — | SP1 DLS[5] |
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