Comparison ledger
KLA 1.112 PSL Wafer, Koh Young Zenith Advanced 3D AOI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Zenith Advanced 3D AOIKoh Young | |
|---|---|---|
| OEM | KLA | Koh Young |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Koh Young Zenith Advanced 3D AOI |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Trade Name | — | Advanced Zenith[3] |
| Equipment Type | — | 3D Automated Optical Inspection (AOI) System[3] |
| Year of Manufacture | — | 2021[3] |
| Voltage | — | 220V AC, Single Phase[3] |
| Frequency | — | 50/60 Hz[3] |
| Rated Current | — | 5A[3] |
| Maximum Current | — | 10A[3] |
| Rated Power | — | 2.2 kW[3] |
| Compressed Air Pressure | — | 0.5–0.8 MPa[3] |
| Machine Dimensions | — | 1,000 × 1,265 × 1,627 mm[3] |
| Machine Weight | — | 600 kg[3] |
| IP Rating | — | IP2X[3] |
| Manufacturer | — | Koh Young[3] |
| Model | — | Zenith Advanced 3D AOI Inspection System[3] |
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