Comparison ledger
KLA 1.112 PSL Wafer, Nordson XD 7500 VR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | XD 7500 VRNordson | |
|---|---|---|
| OEM | KLA | Nordson |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Nordson XD 7500 VR |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Manufacturer | — | Nordson[1] |
| Category | — | Metrology & Inspection[1] |
| Model | — | XD 7500 VR[1] |
| Alternate model designation | — | XD7500VR Jade FP[4] |
| X-ray tube type | — | Open microfocus transmission tube[5] |
| Operating voltage range | — | 30–160 kV[4] |
| Minimum focal spot size | — | 0.95 µm[5] |
| Feature resolution | — | 950 nm (0.95 µm)[4] |
| Geometric magnification | — | Up to 1200×[5] |
| Maximum system magnification | — | 5650×[5] |
| System magnification | — | Up to 4200×[4] |
| Detector | — | 1.3 MP Digital CCD image receptor[5] |
| Detector resolution | — | 1.33 MP[4] |
| Tilt range | — | ±70° (140° total)[5] |
| Rotation | — | 360°[5] |
| Maximum sample dimensions | — | 508 mm × 444 mm[5] |
| Maximum sample weight | — | 5 kg[5] |
| System weight | — | 1900 kg[5] |
| Display | — | 20.1″ DVI digital color LCD (1600 × 1200 pixels)[5] |
| Max. sample dimensions | — | 508 mm × 444 mm[5] |
| Max. sample weight | — | 5 kg[5] |
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