Waferpedia

Comparison ledger

1.112 PSL WaferversusHS 60 SPI

KLA 1.112 PSL Wafer, Parmi HS 60 SPI, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
HS 60 SPIParmi
OEMKLAParmi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferParmi HS 60 SPI
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Vintage—2010[3]
1.112 PSL Wafer entryHS 60 SPI entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing