Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Quanta 450, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 450Thermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage | — | 230V[4] |
| Full load | — | 8A[3] |
| OEM | — | Thermo Fisher Scientific / FEI[4] |
| Model | — | Quanta 450[4] |
| Instrument type | — | Scanning Electron Microscope (SEM)[4] |
| Power | — | 50/60 Hz, 230V[3] |
| Full load current | — | 8A[3] |
| Included components | — | Edwards RV 8, Edwards PV 25 MK, FEI SE R 580 Detector[3] |
| Vintage | — | 2013[4] |
| Category | — | Metrology & Inspection[4] |
| Included component | — | FEI SE R 580 Detector[4] |
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