Waferpedia

Comparison ledger

1.112 PSL WaferversusNT 3300 Optical

KLA 1.112 PSL Wafer, Veeco NT 3300 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAVeeco
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferVeeco NT 3300 Optical
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]8 inch[5]
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Type—Optical Profilometer / Optical 3D Profiling System[3]
Make—Veeco / Wyko[3]
Model—NT 3300[3]
Measurement Modes—VSI (Vertical Scanning Interferometry) and PSI (Phase Shifting Interferometry)[4]
Software—Vision 3.43[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]manualslib.commanualslib.com
  5. [5]Equipment inventory listing