Comparison ledger
KLA 1.112 PSL Wafer, Zeiss 710, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 710Zeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss 710 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| manual title | — | Zeiss 710 Inverted confocal manual[3] |
| Microscope type | — | Confocal laser scanning microscope[4] |
| Microscope stand | — | Zeiss Axio Observer Z1 inverted microscope[4] |
| Detector | — | 34-channel QUASAR detector[4] |
| Laser lines | — | 405, 458, 488, 514, 561, 594, and 633 nm[4] |
| Objectives listed | — | 10x Plan-Apochromat, 20x Plan-Apochromat, 40x W C-Apochromat, 63x Oil Plan-Apochromat[4] |
| Acquisition software | — | ZEN 2008[4] |
| Fluorescence excitation modes | — | Two-photon fluorescence excitation (2PE) and second harmonic generation (SHG) available[5] |
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