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Comparison ledger

1.112 PSL WaferversusEVO 60 XVP

KLA 1.112 PSL Wafer, Zeiss EVO 60 XVP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
EVO 60 XVPZeiss
OEMKLAZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferZeiss EVO 60 XVP
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
1.112 PSL Wafer entryEVO 60 XVP entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com