Comparison ledger
KLA 2131, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2131KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1994– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | HDD[1] | NIST Traceable[5] |
| Manufacturer | KLA[2] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[6] |
| Type | inspection system[2] | — |
| Wafer sizes | 6 inch[1] | — |
| Wafer size | — | 8 inch[5] |
| Traceability | — | NIST Traceable[5] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[5] |
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