Comparison ledger
KLA 2132 Brightfield and KLA 2135, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2135KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA 2135 |
| Specifications | ||
| Configuration | Main body only[1] | — |
| Product type | — | wafer inspection system[2] |
| Technology | — | advanced sensor and image processing technologies[2] |
| Inspection method | — | brightfield, small-pixel, high data rate, digital image processing technology[2] |
| Defect detection | — | detects all types of yield-relevant defects on all process layers[2] |
| Operational use | — | in-line monitoring of advanced processes[2] |
| Throughput | — | two- to three-times throughput improvement over the earlier model KLA 2132[2] |
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