Comparison ledger
KLA 2135 and KLA Archer 500 Overlay Metrology, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2135KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2135 | KLA Archer |
| Cited variants | — |
|
| Specifications | ||
| Product type | wafer inspection system[2] | — |
| Technology | advanced sensor and image processing technologies[2] | — |
| Inspection method | brightfield, small-pixel, high data rate, digital image processing technology[2] | — |
| Defect detection | detects all types of yield-relevant defects on all process layers[2] | — |
| Operational use | in-line monitoring of advanced processes[2] | — |
| Throughput | two- to three-times throughput improvement over the earlier model KLA 2132[2] | — |
| Configuration | — | Without HDD[1] |
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