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2139 UI Brightfield Patterned Surface Defect versus HRP 340 Thickness Measurement

KLA 2139 UI Brightfield Patterned Surface Defect and KLA HRP 340 Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2139 UI Brightfield Patterned Surface DefectKLA
HRP 340 Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2139KLA HRP 340
Specifications
ConfigurationUltra-Broadband Illumination[1]50/60 Hz[2]
Phase—1 Phase / 3 Wires[2]
2139 UI Brightfield Patterned Surface Defect entryHRP 340 Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing