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2139 UI Brightfield Patterned Surface Defect versus UV 1280 SE Thin Film Thickness Measurement

KLA 2139 UI Brightfield Patterned Surface Defect and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2139 UI Brightfield Patterned Surface DefectKLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2139KLA UV 1280 SE Thin Film Thickness Measurement
Specifications
ConfigurationUltra-Broadband Illumination[1]Single phase[2]
Voltage—200 V[2]
Power—1.8 kW[2]
2139 UI Brightfield Patterned Surface Defect entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing