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Comparison ledger

2213-75 TSLKTB Argon versus Puma 9130 Darkfield Defect

KLA 2213-75 TSLKTB Argon and KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2213-75 TSLKTB ArgonKLA
Puma 9130 Darkfield DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2213-75 TSLKTB ArgonKLA Puma 9130
Specifications
ConfigurationCompatible for KLA AIT II & XP Series Systems[1]Refurbished[2]
2213-75 TSLKTB Argon entryPuma 9130 Darkfield Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing