Waferpedia

Comparison ledger

2320 Stress Measurementversus.498 PSL Wafer

KLA 2320 Stress Measurement, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 23xxKLA .498 PSL Wafer
Specifications
ConfigurationRefurbished[1]NIST Traceable[2]
MakeKLA[1]—
Model2320[1]—
Wafer sizes12, 4, 6, 8 inch[1]—
Product descriptionStress Measurement[1]—
NIST traceability—Yes[2]
OEM—KLA[2]
Category—Metrology & Inspection[2]
Traceability—Yes[2]
Description—Particle-sizing calibration standard[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com