Waferpedia

Comparison ledger

2350 versus AIT XUV Darkfield

KLA 2350 and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2350KLA
AIT XUV DarkfieldKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 23xxKLA AIT XUV
Specifications
ConfigurationRefurbished[1]Pillar[2]
Software Version—6.3.24.3[2]
CIM—SECS / GEM[2]
Factory System—FOUPS[2]
Handler System—Robot[2]
Missing Parts—Incomplete Wafer Handler Module & Inspection Module[2]
2350 entryAIT XUV Darkfield entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing