Waferpedia

Comparison ledger

2350 versus MicroSense UMSC 200 BT Measurement

KLA 2350 and KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
2350KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 23xxKLA MicroSense
Specifications
ConfigurationRefurbished[1]10 A[2]
Voltage120 V[2]
Main Air Pressure50 PSI[2]
Stage Air Pressure5 Psi[2]
Measurement TypeFlatness & Thickness[2]
System TypeNon-contact Measurement[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing