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Comparison ledger

2350 versus Surfscan 6420 Unpatterned Surface

KLA 2350 and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2350KLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 23xxKLA Surfscan 6420
Specifications
ConfigurationRefurbished[1]16A[2]
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
2350 entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing