Comparison ledger
KLA 2351 UI, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2351 UIKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2351 | KLA .496 PSL Wafer |
| Specifications | ||
| Voltage | 208V, 3 Phase[1] | — |
| Configuration | 10,000 amps[2] | NIST Traceable[3] |
| Manufacturer | KLA[2] | — |
| Model | 2351 UI[2] | — |
| Equipment type | Inspection system[2] | — |
| Category | Metrology & Inspection[1] | Metrology & Inspection[4] |
| Current | 10,000 amps[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
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