Comparison ledger
KLA .496 PSL Wafer, LEO 1550, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1550LEO | |
|---|---|---|
| OEM | KLA | LEO |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | LEO 1550 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Section | — | FIB / SEM / EDX / ProSEM[3] |
| Sample holders | — | 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[3] |
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