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Comparison ledger

.496 PSL WaferversusEclipse L 200 D

KLA .496 PSL Wafer, Nikon Eclipse L 200 D, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferNikon Eclipse L 200 D
Specifications
ConfigurationNIST Traceable[1]—
Wafer size8 inch[1]8 inch[4]
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]Metrology & Inspection[3]
Power—100–240 VAC[3]
Current—2.4 A[3]
Frequency—50/60 Hz[3]
Make—Nikon[4]
Model—Eclipse L 200 D[4]
Equipment type—Inspection Microscope[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing