Comparison ledger
KLA .496 PSL Wafer, Thermo Fisher Scientific FEI Versa 3 D Dual Beam FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Versa 3 D Dual Beam FIBThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Thermo Fisher Scientific FEI Versa 3 D Dual Beam FIB |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | with Octane Elite Plus EDAX system[1] |
| Wafer size | 8 inch[2] | — |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| Make | — | Thermo Fisher Scientific / FEI[4] |
| Model | — | Versa 3 D[4] |
| Tool type | — | Focused Ion Beam (FIB)[4] |
| Vintage | — | 2013[4] |
| Instrument type | — | Dual Beam FIB (Focused Ion Beam)[4] |
| Configured with | — | Octane Elite Plus EDAX system[1] |
| OEM | — | Thermo Fisher Scientific / FEI[4] |
| Included system | — | Octane Elite Plus EDAX system[1] |
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