Waferpedia

Comparison ledger

.496 PSL WaferversusUX20

KLA .496 PSL Wafer, YXLON UX20, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
UX20YXLON
OEMKLAYXLON
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferYXLON UX20
Specifications
ConfigurationNIST Traceable[1]—
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]—
Manufacturer—YXLON[3]
Model—UX20[3]
Product family—X-ray and CT Inspection Systems[3]
System type—X-ray and CT inspection system[4]
Intended parts—Medium to large cast parts[5]
User interface—Geminy[4]
Inspection modes—2D, 3D, 2D/3D[4]
Maximum sample weight—100 kg[4]
System dimensions (W/D/H)—2250 x 1770 x 2350 mm[4]
Available X-ray tubes—160-225 kV mini-focus; 225 kV MesoFocus[4]
Detector active area—1280 x 1280 px; 3072 x 3072 px[4]
Pixel pitch—179 µm; 139 µm[4]
Inspection envelope DR (2D)—710 x 1090 mm; 800 x 1100 mm[4]
Inspection envelope CT (3D)—190 x 165 mm; 340 x 280 mm[4]
Inspection envelope CT (3D) with ScanExtend—315 x 1085 mm; 540 x 1100 mm[4]
Maximum part weight—100 kg[5]
Cabinet width—2550 mm[5]
Cabinet depth—1770 mm[5]
Cabinet height—2350 mm[5]
Maximum power consumption—3.8 kVA[5]
Maximum dose rate—1 μSv/h[5]
Manipulation—5 axes[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org
  4. [4]yxlon.comet.techyxlon.comet.tech
  5. [5]aegleteq.comaegleteq.com