Comparison ledger
KLA .498 PSL Wafer, KLA Alpha Step 500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Alpha Step |
| Specifications | ||
| Configuration | NIST Traceable[1] | Does not include PC / Software[2] |
| NIST traceability | Yes[1] | — |
| Wafer size | — | - Up to 6"/150mm Wafer Capable[3] |
| - Repeatability | — | 10Å (1s) or 0.1%[3] |
| Type | — | Profilometer[4] |
| Description | — | Surface Profiler[5] |
| Wafer size range | — | 100mm~200mm[5] |
| Vertical range option | — | 2 mm[4] |
| Data export format | — | ASCII file[4] |
| Measurement capabilities | — | Measures roughness, waviness, and stop height[5] |
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