Waferpedia

Comparison ledger

.498 PSL WaferversusHRP 340 Surface

KLA .498 PSL Wafer, KLA HRP 340 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA HRP 340
Specifications
ConfigurationNIST Traceable[1]Bad Load port[2]
NIST traceabilityYes[1]—
OS—Windows XP[3]
Vertical Range—0-131 um[3]
Style Force—0.05-15 mg[3]
Stylus—2.0 um / 60[3]
Wafer size—PSL Standard 8 inch Wafer (9400 A Standard)[3]
OEM—KLA[2]
Model—HRP 340 Surface[2]
Category—Metrology & Inspection[4]
Model designation—HRP340[5]
Description—Surface profilometer[2]
Status—Sold[5]
Vintage—2007[5]
Condition—Excellent[5]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]jenesisequipment.comjenesisequipment.com