Comparison ledger
KLA .498 PSL Wafer, KLA SpectraCD XT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SpectraCD XTKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA SpectraCD XT |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| Manufacturer | — | KLA[2] |
| Model | — | SpectraCD XT[3] |
| Asset # | — | 127400[3] |
| Vintage | — | 2009[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →