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.498 PSL WaferversusSurfscan SP 3 Particle Defect

KLA .498 PSL Wafer, KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run—2011–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Surfscan
Specifications
ConfigurationNIST Traceable[1]HDD not included[2]
NIST traceabilityYes[1]—
Wafer size—Bare wafer inspection station[2]
Illumination—Deep-ultraviolet (DUV)[2]
Wafer loading unit ports—3[2]
Haze maps—Full-wafer high-resolution[2]
.498 PSL Wafer entrySurfscan SP 3 Particle Defect entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing