Waferpedia

Comparison ledger

.498 PSL WaferversusBN 715 CMM

KLA .498 PSL Wafer, Mitutoyo BN 715 CMM, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
BN 715 CMMMitutoyo
OEMKLAMitutoyo
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferMitutoyo BN 715 CMM
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
OEMKLA[1]—
CategoryMetrology & Inspection[1]—
TraceabilityYes[1]—
DescriptionParticle-sizing calibration standard[1]—
Measuring Range—60" x 28" x 24"[2]
Overall Dimensions (L x W x H)—105" x 67" x 115"[2]
Software—CMM Manager[2]
Probing System—Renishaw PH9/TP2[2]
Controller Type—CMMC-3[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]cmmproducts.comcmmproducts.com