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.498 PSL WaferversusAccent HL 5500 PC Hall Effect Measurement

KLA .498 PSL Wafer, Nanometrics Accent HL 5500 PC Hall Effect Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Attribute
OEMKLANanometrics
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferNanometrics Accent HL 5500 PC Hall Effect Measurement
Specifications
ConfigurationNIST Traceable[1]turn-key[2]
NIST traceabilityYes[1]—
OEMKLA[1]—
CategoryMetrology & Inspection[1]—
TraceabilityYes[1]—
DescriptionParticle-sizing calibration standard[1]—
Instrument type—Hall Effect Measurement System[2]
Measured parameters—resistivity, carrier concentration, and mobility[2]
Supported sample geometries—Van der Pauw, bar, or bridge shaped geometries[2]
Control software platform—WinXP[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]hmntl.illinois.eduhmntl.illinois.edu