Comparison ledger
KLA .498 PSL Wafer, Olympus scope1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | scope1Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Olympus scope1 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| OEM | KLA[1] | Olympus[2] |
| Category | Metrology & Inspection[1] | — |
| Traceability | Yes[1] | — |
| Description | Particle-sizing calibration standard[1] | — |
| Vendor | — | Olympus[2] |
| Model | — | MX61A[2] |
| Purpose | — | Semiconductor microscope for sample inspection and documentation[2] |
| Observation methods | — | Brightfield and darkfield[2] |
| Objectives | — | 5x, 20x, 50x, 100x, and 150x objectives on motorized turret[2] |
| Stage focus | — | Motorized stage focus[2] |
| Digital imaging | — | Steam Motion software for calibrated measurements[2] |
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