Comparison ledger
KLA .498 PSL Wafer, Onto Innovation NSX 105 Rev D Macro Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 105 Rev D Macro DefectOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Onto Innovation NSX 105 Rev D Macro Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| OEM | KLA[1] | — |
| Category | Metrology & Inspection[1] | — |
| Traceability | Yes[1] | — |
| Description | Particle-sizing calibration standard[1] | — |
| Wafer Size | — | 8 inch[2] |
| Voltage | — | 200-240 Vac[2] |
| Frequency | — | 50/60 Hz[2] |
| Phase | — | Single Phase[2] |
| Vintage | — | 2001[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →