Comparison ledger
KLA .498 PSL Wafer, Onto Innovation NSX 85 Automatic Wafer & Die Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 85 Automatic Wafer & Die DefectOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Onto Innovation NSX 85 Automatic Wafer & Die Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| OEM | KLA[1] | — |
| Category | Metrology & Inspection[1] | — |
| Traceability | Yes[1] | — |
| Description | Particle-sizing calibration standard[1] | — |
| Asset ID | — | 72503[2] |
| Last Confirm Date | — | March 30, 2026[2] |
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