Waferpedia

Comparison ledger

5100 Overlay Measurement versus HRP 340 Thickness Measurement

KLA 5100 Overlay Measurement and KLA HRP 340 Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
5100 Overlay MeasurementKLA
HRP 340 Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 5100KLA HRP 340
Specifications
OSVMS[1]—
ConfigurationWindows NT / VAX software[1]50/60 Hz[2]
Phase—1 Phase / 3 Wires[2]
5100 Overlay Measurement entryHRP 340 Thickness Measurement entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing