Comparison ledger
KLA 5100 XP Overlay Measurement and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer transport check |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 5100 | KLA INS 3000 |
| Specifications | ||
| Software Version | 14.70.01[1] | — |
| Robot Type | KLA Internal[1] | — |
| Handler | x3 Open Cassette[1] | — |
| Wafer size | — | Wafer transport check[2] |
| Configuration | — | Auto Focus check for each lens[2] |
| Stage | — | Slight left-to-right tilt observed; minor scratches present[2] |
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