Comparison ledger
KLA 8935 FFC AOI and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 8935 FFC AOIKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 8935 | KLA Surfscan 6420 |
| Specifications | ||
| Voltage | 208 VAC[1] | 208V[2] |
| Configuration | 50/60 Hz[1] | 16A[2] |
| Phase | 3 Phase[1] | 1 phase[2] |
| Frequency | — | 60 Hz[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →