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Comparison ledger

8935 FFC AOI versus Surfscan SP 3 Particle Defect

KLA 8935 FFC AOI and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
8935 FFC AOIKLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 8935KLA Surfscan
Specifications
Voltage208 VAC[1]—
Configuration50/60 Hz[1]HDD not included[2]
Phase3 Phase[1]—
Wafer size—Bare wafer inspection station[2]
8935 FFC AOI entrySurfscan SP 3 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing