Waferpedia

Comparison ledger

AIT II Defect versus AIT XUV Darkfield

KLA AIT II Defect and KLA AIT XUV Darkfield, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AIT II DefectKLA
AIT XUV DarkfieldKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AITKLA AIT XUV
Specifications
Software Version5.3.20.4[1]6.3.24.3[2]
CIMSECS, GEM[1]SECS / GEM[2]
Handler SystemDual[1]Robot[2]
Factory InterfaceOpen Cassette[1]—
Factory System—FOUPS[2]
Configuration—Pillar[2]
Missing Parts—Incomplete Wafer Handler Module & Inspection Module[2]
AIT II Defect entryAIT XUV Darkfield entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing