Waferpedia

Comparison ledger

AIT II Defect versus P/N: 0224471-001 or 365998 30mW Ar

KLA AIT II Defect and KLA P/N: 0224471-001 or 365998 30mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA AITKLA P/N: 0224471-001 or 365998 30mW Ar
Specifications
Software Version5.3.20.4[1]
CIMSECS, GEM[1]
Handler SystemDual[1]
Factory InterfaceOpen Cassette[1]
ConfigurationCompatible with KLA 6200, 6220, 6400 and 6420[2]
JDSU/Lumentum P/N2214-30SLQTA[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing