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AIT II Defect versus Prometrix UV 1250 SE Film Thickness Measurement

KLA AIT II Defect and KLA Prometrix UV 1250 SE Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AIT II DefectKLA
Prometrix UV 1250 SE Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AITKLA UV 1250 SE
Specifications
Software Version5.3.20.4[1]2.4[2]
CIMSECS, GEM[1]—
Handler SystemDual[1]—
Factory InterfaceOpen Cassette[1]—
Phase—1 Phase[2]
Configuration—120 Volt[2]
Robot Type—KLA H2D[2]
AIT II Defect entryPrometrix UV 1250 SE Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing