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AIT II Defect versus Surfscan 6420 Unpatterned Surface

KLA AIT II Defect and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AIT II DefectKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AITKLA Surfscan 6420
Specifications
Software Version5.3.20.4[1]—
CIMSECS, GEM[1]—
Handler SystemDual[1]—
Factory InterfaceOpen Cassette[1]—
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
Configuration—16A[2]
AIT II Defect entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing