Waferpedia

Comparison ledger

AIT XUV Darkfield versus Puma 9120 Darkfield Defect

KLA AIT XUV Darkfield and KLA Puma 9120 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
AIT XUV DarkfieldKLA
Puma 9120 Darkfield DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AIT XUVKLA Puma 9120
Specifications
Software Version6.3.24.3[1]—
CIMSECS / GEM[1]—
Factory SystemFOUPS[1]—
Handler SystemRobot[1]—
ConfigurationPillar[1]Refurbished[2]
Missing PartsIncomplete Wafer Handler Module & Inspection Module[1]—
AIT XUV Darkfield entryPuma 9120 Darkfield Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing