Waferpedia

Comparison ledger

Alpha Step 200 versus INS 3000 DUV Defect

KLA Alpha Step 200 and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Alpha Step 200KLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Alpha StepKLA INS 3000
Specifications
Configuration6” Vacuum test chuck[1]Auto Focus check for each lens[2]
Wafer size—Wafer transport check[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
Alpha Step 200 entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing