Comparison ledger
KLA Alpha Step 200 and KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step | KLA Puma 9130 |
| Specifications | ||
| Configuration | 6” Vacuum test chuck[1] | Refurbished[2] |
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