Comparison ledger
KLA Alpha Step D 600 Stylus Profiler and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step | KLA Surfscan |
| Specifications | ||
| Issue | Able to do scans, but the head is not working properly (not precise). The stylus does not have the expected freedom of movement[1] | — |
| Configuration | — | HDD not included[2] |
| Wafer size | — | Bare wafer inspection station[2] |
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